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Silicon Carbide Microelectromechanical Systems for Harsh Environments - Cheung, Rebecca
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Cheung, Rebecca:
Silicon Carbide Microelectromechanical Systems for Harsh Environments - neues Buch

2013, ISBN: 9781860946240

ID: 1681715

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Sample Chapter(s). Chapter 1: Introduction to Silicon Carbide (SIC) Microelectromechanical Systems (MEMS) (800 KB). Contents: Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung); Deposition Techniques for SiC MEMS (C A Zorman et al.); Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996–2002 (L M Porter & F A Mohammad); Dry Etching of SiC (S J Pearton); Design, Performance and Applications of SiC MEMS (S Zappe). Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research. Technology Technology eBook, World Scientific Publishing Company

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Silicon Carbide Microelectromechanical Systems for Harsh Environments - Rebecca Cheung
Vergriffenes Buch, derzeit bei uns nicht verfügbar.
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Rebecca Cheung:
Silicon Carbide Microelectromechanical Systems for Harsh Environments - neues Buch

2006, ISBN: 9781860946240

ID: 691575715

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Silicon Carbide Microelectromechanical Systems for Harsh Environments Bücher > Fremdsprachige Bücher > Englische Bücher gebundene Ausgabe 30.06.2006, Imperial College Press, .200

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Silicon Carbide Microelectromechanical Systems for Harsh Environments - Rebecca Cheung
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Rebecca Cheung:
Silicon Carbide Microelectromechanical Systems for Harsh Environments - gebunden oder broschiert

ISBN: 9781860946240

ID: 744475641

Hardback. New. This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality u

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Silicon Carbide Microelectromechanical Systems for Harsh Environments - Editor-Rebecca Cheung
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Editor-Rebecca Cheung:
Silicon Carbide Microelectromechanical Systems for Harsh Environments - gebunden oder broschiert

2006, ISBN: 9781860946240

ID: 496597228

Imperial College Press, 2006-06-29. Hardcover. Good., Imperial College Press, 2006-06-29

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SILICON CARBIDE MICRO ELECTROMECHANICAL SYSTEMS FOR HARSH ENVIRONMENTS - Cheung
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Cheung:
SILICON CARBIDE MICRO ELECTROMECHANICAL SYSTEMS FOR HARSH ENVIRONMENTS - gebrauchtes Buch

ISBN: 9781860946240

ID: 873345763

WORLD SCIENTIFIC PUBLISHING CO.PVT LTD. New., WORLD SCIENTIFIC PUBLISHING CO.PVT LTD

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Details zum Buch
Silicon Carbide Micro Electromechanical Systems for Harsh Environments

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.

Detailangaben zum Buch - Silicon Carbide Micro Electromechanical Systems for Harsh Environments


EAN (ISBN-13): 9781860946240
ISBN (ISBN-10): 1860946240
Gebundene Ausgabe
Taschenbuch
Erscheinungsjahr: 2006
Herausgeber: Imperial College Pr
181 Seiten
Gewicht: 0,490 kg
Sprache: eng/Englisch

Buch in der Datenbank seit 17.11.2007 18:20:33
Buch zuletzt gefunden am 17.10.2017 14:08:36
ISBN/EAN: 9781860946240

ISBN - alternative Schreibweisen:
1-86094-624-0, 978-1-86094-624-0


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