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Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications - Karen A. Reinhardt, Richard F. Reidy
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Karen A. Reinhardt, Richard F. Reidy:
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ISBN: 0470625953

[SR: 2063643], Hardcover, [EAN: 9780470625958], Wiley-Scrivener, Wiley-Scrivener, Book, [PU: Wiley-Scrivener], Wiley-Scrivener, This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. From the Reviews... "This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate-level enrollment." —Randy Wallace, Department Head, Discovery Park Library, University of North Texas, 13725, Semiconductors, 13707, Electronics, 227544, Electrical & Electronics, 173515, Engineering, 173507, Engineering & Transportation, 1000, Subjects, 283155, Books, 465600, New, Used & Rental Textbooks, 468220, Business & Finance, 468226, Communication & Journalism, 468204, Computer Science, 468224, Education, 468212, Engineering, 468206, Humanities, 468222, Law, 468228, Medicine & Health Sciences, 684283011, Reference, 468216, Science & Mathematics, 468214, Social Sciences, 684300011, Test Prep & Study Guides, 2349030011, Specialty Boutique, 283155, Books

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Handbook for Cleaning for Semiconductor Manufacturing - Reinhardt, Karen A.; Reidy, Richard F.
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Reinhardt, Karen A.; Reidy, Richard F.:
Handbook for Cleaning for Semiconductor Manufacturing - neues Buch

ISBN: 9780470625958

ID: 700543

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. From the Reviews... "This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate-level enrollment." Randy Wallace , Department Head, Discovery Park Library, University of North Texas Technology Technology eBook, Wiley

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Handbook for Cleaning for Semiconductor Manufacturing - Karen A. Reidy, Richard F. Reinhardt
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2010, ISBN: 9780470625958

ID: 815689737

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. Fundamentals and Applications Buch (fremdspr.) gebundene Ausgabe 20.12.2010 Bücher>Fremdsprachige Bücher>Englische Bücher, John Wiley and Sons Ltd, .201

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Handbook for Cleaning for Semiconductor Manufacturing - Karen A. Reidy, Richard F. Reinhardt
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ID: 836748028

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. Fundamentals and Applications Buch (fremdspr.) Bücher>Fremdsprachige Bücher>Englische Bücher, John Wiley and Sons Ltd

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Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications - Karen A. Reinhardt
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Karen A. Reinhardt:
Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications - gebunden oder broschiert

ISBN: 9780470625958

ID: 9780470625958

Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications Handbook-of-Cleaning-in-Semiconductor-Manufacturing~~Karen-Reinhardt Science>Engineering>ELEC Engr Hardcover, Wiley

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Details zum Buch
Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.

Detailangaben zum Buch - Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications


EAN (ISBN-13): 9780470625958
ISBN (ISBN-10): 0470625953
Gebundene Ausgabe
Erscheinungsjahr: 2011
Herausgeber: John Wiley & Sons
590 Seiten
Gewicht: 1,193 kg
Sprache: eng/Englisch

Buch in der Datenbank seit 18.05.2011 23:09:14
Buch zuletzt gefunden am 08.11.2017 14:48:02
ISBN/EAN: 9780470625958

ISBN - alternative Schreibweisen:
0-470-62595-3, 978-0-470-62595-8


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