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Temperature Dependence of Actuated Membranes for RF MEMS Switches - Noel, Julien
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Temperature Dependence of Actuated Membranes for RF MEMS Switches - Taschenbuch

ISBN: 3639080637

ID: 20019792775

[EAN: 9783639080636], Neubuch, Publisher/Verlag: VDM Verlag Dr. Müller | Applications for thin film materials in a cryogenicenvironment | Over the last 10 years, understanding of mechanicalproperties of thin film material has been essentialfor improving life-time operations ofmicroelectromechanical systems (MEMS). Although,properties of bulk materials might be wellcharacterized, thin-film properties are considerablydifferent from those of the bulk. It cannot beassumed that mechanical properties using bulkspecimens will apply to the same materials when usedas a thin film. For many microelectronicthin films, material properties depend strongly onthe details of the deposition processes and thegrowth conditions on its substrate.Temperature dependence of a MEMS switch gold thinfilm membrane on the pull down voltage as thetemperature is varied from room temperature(300 K) to cryogenic temperature (10 K) isdetermined with RF MEMS shunt switches. The switchis composed of a gold coplanar waveguide structurewith a gold bridge membrane suspended above an areaof the center conductor which is covered by adielectric (BaTiO3). The gold membrane is actuatedby an electrostatic force acting between thetransmission line and the membrane when a voltage isapplied. Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Although, properties of bulk materials might be well characterized, thin-film properties are considerably different from those of the bulk. It cannot be assumed that mechanical properties using bulk specimens will apply to the same materials when used as a thin film. For many microelectronic thin films, material properties depend strongly on the details of the deposition processes and the growth conditions on its substrate. Temperature dependence of a MEMS switch gold thin film membrane on the pull down voltage as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K) is determined with RF MEMS shunt switches. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when a voltage is applied. | Format: Paperback | Language/Sprache: english | 88 pp, [PU: VDM Verlag Dr. Müller, Saarbrücken]

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Temperature Dependence Of Actuated Membranes For Rf Mems Switches - Noel Julien
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2008, ISBN: 9783639080636

ID: 357262690

Over the last 10 years, understanding of mechanicalproperties of thin film material has been essentialfor improving life-time operations ofmicroelectromechanical systems (MEMS). Although,properties of bulk materials might be wellcharacterized, thin-film properties are considerablydifferent from those of the bulk. It cannot beassumed that mechanical properties using bulkspecimens will apply to the same materials when usedas a thin film. For many microelectronicthin films, material properties depend strongly onthe details of the deposition processes and thegrowth conditions on its substrate.Temperature dependence of a MEMS switch gold thinfilm membrane on the pull down voltage as thetemperature is varied from room temperature(300 K) to cryogenic temperature (10 K) isdetermined with RF MEMS shunt switches. The switchis composed of a gold coplanar waveguide structurewith a gold bridge membrane suspended above an areaof the center conductor which is covered by adielectric (BaTiO3). The gold membrane is actuatedby an electrostatic force acting between thetransmission line and the membrane when a voltage isapplied. Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Although, properties of bulk materials might be well characterized, thin-film properties are considerably different from those of the bulk. It cannot be assumed that mechanical properties using bulk specimens will apply to the same materials when used as a thin film. For many microelectronic thin films, material properties depend strongly on the details of the deposition processes and the growth conditions on its substrate. Temperature dependence of a MEMS switch gold thin film membrane on the pull down voltage as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K) is determined with RF MEMS shunt switches. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when a voltage is applied. Applications for thin film materials in a cryogenicenvironment Bücher > Sachbücher > Naturwissenschaften & Technik > Ingenieurwissenschaft & Technik Taschenbuch 01.11.2008 Buch (fremdspr.), VDM, .200

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Temperature Dependence Of Actuated Membranes For Rf Mems Switches - Noel Julien
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Noel Julien:
Temperature Dependence Of Actuated Membranes For Rf Mems Switches - neues Buch

ISBN: 9783639080636

ID: d35fefaebef2c953350b86e21f022bc1

Applications for thin film materials in a cryogenicenvironment Over the last 10 years, understanding of mechanicalproperties of thin film material has been essentialfor improving life-time operations ofmicroelectromechanical systems (MEMS). Although,properties of bulk materials might be wellcharacterized, thin-film properties are considerablydifferent from those of the bulk. It cannot beassumed that mechanical properties using bulkspecimens will apply to the same materials when usedas a thin film. For many microelectronicthin films, material properties depend strongly onthe details of the deposition processes and thegrowth conditions on its substrate.Temperature dependence of a MEMS switch gold thinfilm membrane on the pull down voltage as thetemperature is varied from room temperature(300 K) to cryogenic temperature (10 K) isdetermined with RF MEMS shunt switches. The switchis composed of a gold coplanar waveguide structurewith a gold bridge membrane suspended above an areaof the center conductor which is covered by adielectric (BaTiO3). The gold membrane is actuatedby an electrostatic force acting between thetransmission line and the membrane when a voltage isapplied. Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Although, properties of bulk materials might be well characterized, thin-film properties are considerably different from those of the bulk. It cannot be assumed that mechanical properties using bulk specimens will apply to the same materials when used as a thin film. For many microelectronic thin films, material properties depend strongly on the details of the deposition processes and the growth conditions on its substrate. Temperature dependence of a MEMS switch gold thin film membrane on the pull down voltage as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K) is determined with RF MEMS shunt switches. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when a voltage is applied. Bücher / Sachbücher / Naturwissenschaften & Technik / Ingenieurwissenschaft & Technik 978-3-639-08063-6, VDM

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Temperature Dependence Of Actuated Membranes For Rf Mems Switches - Noel Julien
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ISBN: 9783639080636

ID: 34299335

Over the last 10 years, understanding of mechanicalproperties of thin film material has been essentialfor improving life-time operations ofmicroelectromechanical systems (MEMS). Although,properties of bulk materials might be wellcharacterized, thin-film properties are considerablydifferent from those of the bulk. It cannot beassumed that mechanical properties using bulkspecimens will apply to the same materials when usedas a thin film. For many microelectronicthin films, material properties depend strongly onthe details of the deposition processes and thegrowth conditions on its substrate.Temperature dependence of a MEMS switch gold thinfilm membrane on the pull down voltage as thetemperature is varied from room temperature(300 K) to cryogenic temperature (10 K) isdetermined with RF MEMS shunt switches. The switchis composed of a gold coplanar waveguide structurewith a gold bridge membrane suspended above an areaof the center conductor which is covered by adielectric (BaTiO3). The gold membrane is actuatedby an electrostatic force acting between thetransmission line and the membrane when a voltage isapplied. Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Although, properties of bulk materials might be well characterized, thin-film properties are considerably different from those of the bulk. It cannot be assumed that mechanical properties using bulk specimens will apply to the same materials when used as a thin film. For many microelectronic thin films, material properties depend strongly on the details of the deposition processes and the growth conditions on its substrate. Temperature dependence of a MEMS switch gold thin film membrane on the pull down voltage as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K) is determined with RF MEMS shunt switches. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when a voltage is applied. Applications for thin film materials in a cryogenicenvironment Buch (dtsch.) Bücher>Sachbücher>Naturwissenschaften & Technik>Ingenieurwissenschaft & Technik, VDM

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Temperature Dependence of Actuated Membranes for RF MEMS Switches - Julien Noel
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Julien Noel:
Temperature Dependence of Actuated Membranes for RF MEMS Switches - neues Buch

ISBN: 9783639080636

ID: 0ee5f2730539dae91b4b9c5c453ab2bb

Over the last 10 years, understanding of mechanicalproperties of thin film material has been essentialfor improving life-time operations ofmicroelectromechanical systems (MEMS). Although,properties of bulk materials might be wellcharacterized, thin-film properties are considerablydifferent from those of the bulk. It cannot beassumed that mechanical properties using bulkspecimens will apply to the same materials when usedas a thin film. For many microelectronicthin films, material properties depend strongly onthe details of the deposition processes and thegrowth conditions on its substrate.Temperature dependence of a MEMS switch gold thinfilm membrane on the pull down voltage as thetemperature is varied from room temperature(300 K) to cryogenic temperature (10 K) isdetermined with RF MEMS shunt switches. The switchis composed of a gold coplanar waveguide structurewith a gold bridge membrane suspended above an areaof the center conductor which is covered by adielectric (BaTiO3). The gold membrane is actuatedby an electrostatic force acting between thetransmission line and the membrane when a voltage isapplied. Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Although, properties of bulk materials might be well characterized, thin-film properties are considerably different from those of the bulk. It cannot be assumed that mechanical properties using bulk specimens will apply to the same materials when used as a thin film. For many microelectronic thin films, material properties depend strongly on the details of the deposition processes and the growth conditions on its substrate. Temperature dependence of a MEMS switch gold thin film membrane on the pull down voltage as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K) is determined with RF MEMS shunt switches. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when a voltage is applied. Bücher / Naturwissenschaften, Medizin, Informatik & Technik / Technik, [PU: VDM Verlag Dr. Müller, Saarbrücken]

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TEMPERATURE DEPENDENCE OF ACTUATED MEMBRANES FOR RF MEMS SWITCHES
Autor:

Noel Julien

Titel:

TEMPERATURE DEPENDENCE OF ACTUATED MEMBRANES FOR RF MEMS SWITCHES

ISBN-Nummer:

Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Although, properties of bulk materials might be well characterized, thin-film properties are considerably different from those of the bulk. It cannot be assumed that mechanical properties using bulk specimens will apply to the same materials when used as a thin film. For many microelectronic thin films, material properties depend strongly on the details of the deposition processes and the growth conditions on its substrate. Temperature dependence of a MEMS switch gold thin film membrane on the pull down voltage as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K) is determined with RF MEMS shunt switches. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when a voltage is applied.

Detailangaben zum Buch - TEMPERATURE DEPENDENCE OF ACTUATED MEMBRANES FOR RF MEMS SWITCHES


EAN (ISBN-13): 9783639080636
ISBN (ISBN-10): 3639080637
Taschenbuch
Erscheinungsjahr: 2008
Herausgeber: VDM Verlag
88 Seiten
Gewicht: 0,147 kg
Sprache: ger/Deutsch

Buch in der Datenbank seit 12.03.2009 20:09:23
Buch zuletzt gefunden am 14.06.2017 16:32:46
ISBN/EAN: 3639080637

ISBN - alternative Schreibweisen:
3-639-08063-7, 978-3-639-08063-6


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