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MEMS: Design and Fabrication - Mohamed Gad-el-Hak (Editor)
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2005, ISBN: 9780849391385

ID: 9780849391385

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. The second volume, MEMS: Design and Fabrication, details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. It begins with an overview of MEMS materials and then examines in detail various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB® technology, and deep reactive ion etching. This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication.MEMS: Design and Fabrication comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology. Textbooks New, Books ~~ Technology~~ Electronics ~~ Microelectronics, MEMS-Design-and-Fabrication~~Mohamed-Gad-El-Hak, 999999999, MEMS: Design and Fabrication, Mohamed Gad-el-Hak (Editor), 0849391385, CRC Press, 11/15/2005 12:00:00 AM, , , , CRC Press

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Introduction; Mohamed Gad-el-Hak Materials for Microelectromechanical Systems; Christian A. Zorman, Mehran Mehregany, and J. Jay McMahon MEMS Fabrication; Guangyao Jia and Marc J. Madou LIGA and Micromolding; Guangyao Jia and Marc J. Madou X-Ray Based Fabrication; Todd Christenson EFAB Technology and Applications; Adam L. Cohen and Chris A. Bang Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability; Robert S. Okojie Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide; Glenn M. Beheim and Laura J. Evans Polymer Microsystems: Materials and Fabrication; Gary M. Atkinson and Zoubeida Ounaies Optical Diagnostics to Investigate the Entrance Length in Microchannels; Sang-Youp Lee, Jaesung Jang, and Steven T. Wereley Microfabricated Chemical Sensors for Aerospace Applications; Gary W. Hunter, Jennifer C. Xu, Chung-Chiun Liu, and Darby B. Makel Packaging of Harsh Environment MEMS Devices; Liang-Yu Chen and Jih-Fen Lei Fabrication Technologies for Nanoelectromechanical Systems; Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider Molecular Self-Assembly: Fundamental Concepts and Applications; Jill A. Miwa and Federico Rosei Index Technology Technology eBook, CRC Press

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MEMS Design and Fabrication: The MEMS Handbook
Autor:

Gad-El-Hak, Mohamed

Titel:

MEMS Design and Fabrication: The MEMS Handbook

ISBN-Nummer:

0849391385

Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.

Detailangaben zum Buch - MEMS Design and Fabrication: The MEMS Handbook


EAN (ISBN-13): 9780849391385
ISBN (ISBN-10): 0849391385
Gebundene Ausgabe
Erscheinungsjahr: 2005
Herausgeber: CRC PR INC
664 Seiten
Gewicht: 1,152 kg
Sprache: eng/Englisch

Buch in der Datenbank seit 22.05.2007 11:58:55
Buch zuletzt gefunden am 06.03.2017 09:53:23
ISBN/EAN: 0849391385

ISBN - alternative Schreibweisen:
0-8493-9138-5, 978-0-8493-9138-5

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