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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - David Attwood
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This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science. electrical and electronics,engineering,nuclear physics,particle physics,physics,science and math,science and math,textbooks Physics, Cambridge University Press

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[SR: 353086], Taschenbuch, [EAN: 9780521029971], Cambridge University Press, Cambridge University Press, Book, [PU: Cambridge University Press], Cambridge University Press, Paperback, 60518011, Prinzip der Elektrizität, 60516011, Elektrotechnik, 60448011, Ingenieurwesen & Technik, 60447011, Architektur, Technik & Ingenieurswesen, 54071011, Genres, 52044011, Fremdsprachige Bücher, 1320249031, Optik, 60516011, Elektrotechnik, 60448011, Ingenieurwesen & Technik, 60447011, Architektur, Technik & Ingenieurswesen, 54071011, Genres, 52044011, Fremdsprachige Bücher, 56404011, Kernphysik, 56375011, Physik, 56047011, Wissenschaft, 54071011, Genres, 52044011, Fremdsprachige Bücher

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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Attwood, David
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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Taschenbuch

2007

ISBN: 052102997X

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[EAN: 9780521029971], [PU: Cambridge University Press], Science|Radiation, Technology|Electricity, This Book is in Good Condition. Clean Copy With Light Amount of Wear. 100% Guaranteed. Summary: Preface; Acknowledgements; 1. Introduction; 2. Radiation and scattering at EUV and soft x-ray wavelengths; 3. Wave propagation and refractive index at EUV and soft x-ray wavelengths; 4. Multilayer interference coatings; 5. Synchrotron radiation; 6. Physics of hot dense plasmas; 7. Extreme ultraviolet and soft x-ray lasers; 8. Coherence at short wavelengths; 9. Soft x-ray microscopy with diffractive optics; 10. Extreme ultraviolet and x-ray lithography; Appendices; Index.

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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - David Attwood
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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Taschenbuch

2007, ISBN: 9780521029971

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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - David Attwood
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David Attwood:
Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Taschenbuch

2007, ISBN: 052102997X

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[EAN: 9780521029971], [PU: Cambridge University Press], Science|Radiation, Technology|Electricity

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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications
Autor:

Attwood, David

Titel:

Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications

ISBN-Nummer:

052102997X

This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.

Detailangaben zum Buch - Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications


EAN (ISBN-13): 9780521029971
ISBN (ISBN-10): 052102997X
Taschenbuch
Erscheinungsjahr: 2007
Herausgeber: CAMBRIDGE UNIV PR
470 Seiten
Gewicht: 0,866 kg
Sprache: eng/Englisch

Buch in der Datenbank seit 29.05.2007 09:45:08
Buch zuletzt gefunden am 26.01.2017 13:01:48
ISBN/EAN: 052102997X

ISBN - alternative Schreibweisen:
0-521-02997-X, 978-0-521-02997-1

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