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Handbook Of Cleaning In Semiconductor Manufacturing
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Handbook Of Cleaning In Semiconductor Manufacturing - neues Buch

ISBN: 9780470625958

ID: 14221931

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal. This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. From the Reviews."This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate-level enrollment." Randy Wallace, Department Head, Discovery Park Library, University of North Texas Books, Technology, Engineering and Agriculture~~Electronicsl and Communications Engineering~~Electronics Engineering, Handbook Of Cleaning In Semiconductor Manufacturing~~Book~~9780470625958, , , , , , , , , ,, [PU: Wiley]

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Handbook for Cleaning for Semiconductor Manufacturing - Reinhardt, Karen A.; Reidy, Richard F.
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Handbook for Cleaning for Semiconductor Manufacturing - neues Buch

ISBN: 9780470625958

ID: 700543

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. From the Reviews... "This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate-level enrollment." Randy Wallace , Department Head, Discovery Park Library, University of North Texas Technology Technology eBook, Wiley

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Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications - Reinhardt, Karen A. / Reidy, Richard F.
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Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications - gebrauchtes Buch

ISBN: 9780470625958

ID: 10902156

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications Reinhardt, Karen A. / Reidy, Richard F., Wiley-Scrivener

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Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications (Wiley-Scrivener)
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Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications (Wiley-Scrivener) - gebrauchtes Buch

ISBN: 9780470625958

ID: 00357d7a18ec335156c2bc35b06482af

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation., [PU: Wiley]

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Handbook for Cleaning for Semiconductor Manufacturing Fundamentals and Applications - Karen Reinhardt
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Handbook for Cleaning for Semiconductor Manufacturing Fundamentals and Applications - neues Buch

ISBN: 9780470625958

ID: 9780470625958

Handbook for Cleaning for Semiconductor Manufacturing Fundamentals and Applications Author :Karen Reinhardt 9780470625958 0470625953, [PU: Wiley]

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Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications
Autor:

Reinhardt, Karen A.; Reidy, Richard F.

Titel:

Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications

ISBN-Nummer:

9780470625958

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.

Detailangaben zum Buch - Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications


EAN (ISBN-13): 9780470625958
ISBN (ISBN-10): 0470625953
Gebundene Ausgabe
Erscheinungsjahr: 2011
Herausgeber: John Wiley & Sons
590 Seiten
Gewicht: 1,193 kg
Sprache: eng/Englisch

Buch in der Datenbank seit 18.05.2011 23:09:14
Buch zuletzt gefunden am 03.08.2016 10:17:08
ISBN/EAN: 9780470625958

ISBN - alternative Schreibweisen:
0-470-62595-3, 978-0-470-62595-8

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