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Design of a Monolithic 3DOF MEMS Capacitive Accelerometer - Muhammad Shuja Khan
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Muhammad Shuja Khan:

Design of a Monolithic 3DOF MEMS Capacitive Accelerometer - neues Buch

ISBN: 9783845409528

ID: 704eb7e7a1b1d970160a74307da5159d

Utilizing Surface Micromachining Technology Using PolyMUMPS Process Sensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most important types of silicon-based sensor. MEMS capacitive accelerometers have been extensively used in automobiles, inertial navigation systems, earth quake detection and many other bio-medical applications. This book deals with the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis Accelerometers on a single substrate and utilizes a surface micromachining technology using standard PolyMUMPs process. The designed accelerometer is 3mm×3.1mm in size, has low mechanical noise floor, high sense capacitance and high sensitivity along in-plane (x and y) and out-of-plane (z) axes. Performing a detailed finite element analysis in ANSYS 11.o, physical level simulation has been done to verify the deflection for x, y and z axes with respect to the applied acceleration (g). Bücher / Fremdsprachige Bücher / Englische Bücher 978-3-8454-0952-8, LAP Lambert Acad. Publ.

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Design of a Monolithic 3DOF MEMS Capacitive Accelerometer - Muhammad Shuja Khan
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Muhammad Shuja Khan:

Design of a Monolithic 3DOF MEMS Capacitive Accelerometer - Taschenbuch

2011, ISBN: 3845409525

ID: 10409414639

[EAN: 9783845409528], Neubuch, [PU: LAP Lambert Acad. Publ. Jul 2011], This item is printed on demand - Print on Demand Titel. Neuware - Sensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most important types of silicon-based sensor. MEMS capacitive accelerometers have been extensively used in automobiles, inertial navigation systems, earth quake detection and many other bio-medical applications. This book deals with the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis Accelerometers on a single substrate and utilizes a surface micromachining technology using standard PolyMUMPs process. The designed accelerometer is 3mm×3.1mm in size, has low mechanical noise floor, high sense capacitance and high sensitivity along in-plane (x and y) and out-of-plane (z) axes. Performing a detailed finite element analysis in ANSYS 11.o, physical level simulation has been done to verify the deflection for x, y and z axes with respect to the applied acceleration (g). 92 pp. Englisch

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Design of a Monolithic 3DOF MEMS Capacitive Accelerometer - Muhammad Shuja Khan
Vergriffenes Buch, derzeit bei uns nicht verfügbar.
(*)
Muhammad Shuja Khan:
Design of a Monolithic 3DOF MEMS Capacitive Accelerometer - neues Buch

ISBN: 9783845409528

ID: 137383099

Sensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most important types of silicon-based sensor. MEMS capacitive accelerometers have been extensively used in automobiles, inertial navigation systems, earth quake detection and many other bio-medical applications. This book deals with the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis Accelerometers on a single substrate and utilizes a surface micromachining technology using standard PolyMUMPs process. The designed accelerometer is 3mm×3.1mm in size, has low mechanical noise floor, high sense capacitance and high sensitivity along in-plane (x and y) and out-of-plane (z) axes. Performing a detailed finite element analysis in ANSYS 11.o, physical level simulation has been done to verify the deflection for x, y and z axes with respect to the applied acceleration (g). Utilizing Surface Micromachining Technology Using PolyMUMPS Process Buch (fremdspr.) Bücher>Fremdsprachige Bücher>Englische Bücher, LAP Lambert Acad. Publ.

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Design Of A Monolithic 3dof Mems Capacitive Accelerometer
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Design Of A Monolithic 3dof Mems Capacitive Accelerometer - neues Buch

ISBN: 9783845409528

Muhammad Shuja Khan,Paperback, English-language edition,Pub by AV Akademikerverlag GmbH & Co. KG. Books Books ~~ Technology~~ Electronics ~~ General Design-of-a-Monolithic-3DOF-MEMS-Capacitive-Accelerometer~~Muhammad-Shuja-Khan AV Akademikerverlag GmbH & Co. KG.

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Design of a Monolithic 3DOF MEMS Capacitive Accelerometer - Khan, Muhammad Shuja
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Khan, Muhammad Shuja:
Design of a Monolithic 3DOF MEMS Capacitive Accelerometer - Taschenbuch

ISBN: 3845409525

Gebundene Ausgabe, ID: 10726509

Utilizing Surface Micromachining Technology Using PolyMUMPS Process - Buch, gebundene Ausgabe, 92 S., Beilagen: Paperback, Erschienen: 2011 LAP Lambert Acad. Publ.

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