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SiO2 in Si Microdevices - Itsumi, Manabu
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Itsumi, Manabu:

SiO2 in Si Microdevices - Taschenbuch

2010, ISBN: 3642077668, Lieferbar binnen 4-6 Wochen Versandkosten:Versandkostenfrei innerhalb der BRD

ID: 9783642077661

Internationaler Buchtitel. In englischer Sprache. Verlag: Springer-Verlag GmbH, Paperback, 340 Seiten, L=235mm, B=155mm, H=18mm, Gew.=515gr, [GR: 16830 - HC/Maschinenbau/Fertigungstechnik], Kartoniert/Broschiert, Klappentext: Electronic systems and digital computers are indispensable elements of modern multimedia technologies and the Internet society. But their explosive advance would not have been possible without the extraordinary progress in VLSI technology using high-quality SiO2. This volume addresses the thin gate oxides involved in the individual processes in fabrication, e.g. the growth, cleaning and thermal oxidation of silicon, metal interconnect formation, and photolithography. It describes new methods for observing defects in SiO2 as well as novel approaches to eliminating such defects. The book will be a valuable resource for all materials scientists and engineers seeking to further advance the quality of silicon microdevices. Electronic systems and digital computers are indispensable elements of modern multimedia technologies and the Internet society. But their explosive advance would not have been possible without the extraordinary progress in VLSI technology using high-quality SiO2. This volume addresses the thin gate oxides involved in the individual processes in fabrication, e.g. the growth, cleaning and thermal oxidation of silicon, metal interconnect formation, and photolithography. It describes new methods for observing defects in SiO2 as well as novel approaches to eliminating such defects. The book will be a valuable resource for all materials scientists and engineers seeking to further advance the quality of silicon microdevices.

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SiO2 in Si Microdevices
Autor:

Itsumi, Manabu

Titel:

SiO2 in Si Microdevices

ISBN-Nummer:

3642077668

Electronic systems and digital computers are indispensable elements of modern multimedia technologies and the Internet society. But their explosive advance would not have been possible without the extraordinary progress in VLSI technology using high-quality SiO2. This volume addresses the thin gate oxides involved in the individual processes in fabrication, e.g. the growth, cleaning and thermal oxidation of silicon, metal interconnect formation, and photolithography. It describes new methods for observing defects in SiO2 as well as novel approaches to eliminating such defects. The book will be a valuable resource for all materials scientists and engineers seeking to further advance the quality of silicon microdevices.

Detailangaben zum Buch - SiO2 in Si Microdevices


EAN (ISBN-13): 9783642077661
ISBN (ISBN-10): 3642077668
Taschenbuch
Erscheinungsjahr: 2010
Herausgeber: Springer-Verlag GmbH
340 Seiten
Gewicht: 0,515 kg
Sprache: eng/Englisch

Buch in der Datenbank seit 06.02.2011 16:26:26
Buch zuletzt gefunden am 06.02.2011 16:26:26
ISBN/EAN: 3642077668

ISBN - alternative Schreibweisen:
3-642-07766-8, 978-3-642-07766-1

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