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Fabrication of Silicon Microprobes for Optical Near-Field Applications - Minh, Phan Ngoc; Takahito, Ono; Masayoshi, Esashi
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Minh, Phan Ngoc; Takahito, Ono; Masayoshi, Esashi:

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ISBN: 9780849311543

ID: 263302

Preface INTRODUCTION Introduction Structure of the Book References INTRODUCTION OF NEAR-FIELD OPTICS Far-Field Light and Diffraction Effect Concept of Near-Field Optics and Optical Near-Field Microscopy Instrumentation of Optical Near-Field Imaging Techniques for Control of the Tip-Sample Distance Tapered Optical Fiber Based Optical Near-Field Probes Disadvantages of Optical Fiber Based Probes and Solutions with Silicon Micromachined Probes References INTRODUCTION OF SILICON MICROMACHINING TECHNOLOGY Lithography Thermal Oxidation of Silicon Metallization Silicon Etching Silicon Oxide Etching Anodic Bonding and Packaging References FABRICATION OF SILICON MICROPROBES FOR OPTICAL NEAR-FIELD APPLICATIONS Overview of Micromachined Optical Near-Field Probes Design of the Probes Principle of the Fabrication Process Detail of the Fabrication Process Fabrication Results and Discussion References EVALUATION OF THE MICROFABRICATED OPTICAL NEAR-FIELD PROBES Optical Throughput Measurement Measurement of Spatial Distribution of the Near-Field Light at the Fabricated Aperture Polarization Behaviors of the Fabricated Aperture Static and Dynamic Properties of the Fabricated Cantilevers Discussion References NOVEL PROBES FOR LOCALLY ENHANCING OF NEAR-FIELD LIGHT AND OTHER APPLICATIONS Fabrication of the Coaxial Apertured Probe Fabrication of Apertured Probe with a Single Carbon Nano Tube Fabrication of the Apertured Probe with an Embedded Ag Particle Fabrication and Characterization of a Hybrid Structure of Optical Fiber and Apertured Cantilever for Optical Near-Field Applications Fabrication and Characterization of Metallic Contacts in Nanoscale Size for Thermal Profiler and Thermal Recording Probe Array Initial Results of the Fabrication of Electron Field Emission Devices Discussion References USING FINITE DIFFERENCE TIME DOMAIN METHOD Introduction FDTD modeling for optical near-field simulation Results of the FDTD simulation References SUB-WAVELENGTH OPTICAL IMAGING WITH THE FABRICATED PROBES Introduction Measurement Setups Measurement Results Discussion References OPTICAL NEAR-FIELD LITHOGRAPHY Introduction Fabrication of Nanoscale Aperture and Slits Optical Near-Field Patterns Transfer Grid Pattern Transfer Using Polarized Light Conclusion References OPTICAL NEAR-FIELD RECORDING WITH THE FABRICATED APERTURE ARRAY Introduction Concept of the VCSEL/NSOM and Fabrication Process Results of Fabrication and First Result of Recording Discussion References FUTURE ASPECT AND CONCLUSIONS Future Aspect Conclusion of the Work Subject Index Technology Technology eBook, CRC Press

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Fabrication of Silicon Microprobes for Optical Near-Field Applications - Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi
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Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi:

Fabrication of Silicon Microprobes for Optical Near-Field Applications - neues Buch

ISBN: 9780849311543

The development of near-field optics marked a major advance in microscopy and our ability to develop nanoscale technologies. However, the tapered optical fiber widely in use as the optical near-field probe has serious limitations in its fabrication, its optical transmission efficiency, and its use in arrays.Fabrication of Silicon Microprobes for Optical Near-Field Applications reports on several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20 nanometers. They have investigated in detail the probes' optical performance characteristics and show how the silicon probes overcome the limitations of the optical fiber probes in terms of production throughput, optical throughput, reproducibility, simplicity of instrumentation, and mechanical performance. Textbooks New Books ~~ Science~~ Physics ~~ Optics & Light Fabrication-of-Silicon-Microprobes-for-Optical-Near-Field-Applications~~Phan-Ngoc-Minh CRC Press With particular relevance in the revolutionary field of near-field optics, Fabrication of Silicon Microprobes for Optical Near-Field Applications demonstrates the application of silicon micromachining in fabricating the state-of-the-art optical probes used in the most powerful microscopes. The technology addressed in this reference greatly improves upon the use of optical fibers, which are very fragile and less efficient in dealing with applications that require an array of nano light sources. The book presents several technological approaches for fabricating ultra-small apertures using Si micromachining technology for Atomic Force Microscopy (AFM) and Near-Field Scanning Optical Microscopy (NSOM) probes.

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Fabrication of Silicon Microprobes for Optical Near-Field Applications - Minh, Phan Ngoc; Ono, Takahito; Esashi, Masayoshi
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Internationaler Buchtitel. In englischer Sprache. Verlag: CRC PR INC, 192 Seiten, L=263mm, B=146mm, H=15mm, Gew.=408gr, [GR: 16440 - HC/Elektrizität/Magnetismus/Optik], [SW: - Technology & Industrial Arts], Gebunden, Klappentext: With particular relevance in the revolutionary field of near-field optics, Fabrication of Silicon Microprobes for Optical Near-Field Applications demonstrates the application of silicon micromachining in fabricating the state-of-the-art optical probes used in the most powerful microscopes. The technology addressed in this reference greatly improves upon the use of optical fibers, which are very fragile and less efficient in dealing with applications that require an array of nano light sources. The book presents several technological approaches for fabricating ultra-small apertures using Si micromachining technology for Atomic Force Microscopy (AFM) and Near-Field Scanning Optical Microscopy (NSOM) probes. With particular relevance in the revolutionary field of near-field optics, Fabrication of Silicon Microprobes for Optical Near-Field Applications demonstrates the application of silicon micromachining in fabricating the state-of-the-art optical probes used in the most powerful microscopes. The technology addressed in this reference greatly improves upon the use of optical fibers, which are very fragile and less efficient in dealing with applications that require an array of nano light sources. The book presents several technological approaches for fabricating ultra-small apertures using Si micromachining technology for Atomic Force Microscopy (AFM) and Near-Field Scanning Optical Microscopy (NSOM) probes.

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Fabrication of Silicon Microprobes for Optical Near-Field Applications 1st Edition - Phan Ngoc Minh
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Fabrication of Silicon Microprobes for Optical Near-Field Applications 1st Edition Author :Phan Ngoc Minh 9780849311543 0849311543, [PU: CRC Press]

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Fabrication of Silicon Microprobes for Optical Near-Field Applications
Autor:

Minh, Phan Ngoc; Ono, Takahito; Esashi, Masayoshi

Titel:

Fabrication of Silicon Microprobes for Optical Near-Field Applications

ISBN-Nummer:

0849311543

With particular relevance in the revolutionary field of near-field optics, Fabrication of Silicon Microprobes for Optical Near-Field Applications demonstrates the application of silicon micromachining in fabricating the state-of-the-art optical probes used in the most powerful microscopes. The technology addressed in this reference greatly improves upon the use of optical fibers, which are very fragile and less efficient in dealing with applications that require an array of nano light sources. The book presents several technological approaches for fabricating ultra-small apertures using Si micromachining technology for Atomic Force Microscopy (AFM) and Near-Field Scanning Optical Microscopy (NSOM) probes.

Detailangaben zum Buch - Fabrication of Silicon Microprobes for Optical Near-Field Applications


EAN (ISBN-13): 9780849311543
ISBN (ISBN-10): 0849311543
Gebundene Ausgabe
Erscheinungsjahr: 2002
Herausgeber: CRC PR INC
192 Seiten
Gewicht: 0,408 kg
Sprache: eng/Englisch

Buch in der Datenbank seit 22.01.2008 19:26:09
Buch zuletzt gefunden am 21.09.2016 15:03:40
ISBN/EAN: 0849311543

ISBN - alternative Schreibweisen:
0-8493-1154-3, 978-0-8493-1154-3

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