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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Attwood, David
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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - gebrauchtes Buch

ISBN: 9780521029971

ID: 1719507

This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science. Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications Attwood, David, Cambridge University Press

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2007, ISBN: 9780521029971

ID: 456356496

This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science. Principles and Applications Bücher > Fremdsprachige Bücher > Englische Bücher Taschenbuch 22.02.2007, Cambridge University Press, .200

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Soft X-Rays and Extreme Ultraviolet Radiation - David Attwood
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Soft X-Rays and Extreme Ultraviolet Radiation - neues Buch

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Principles and Applications This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science. Bücher / Fremdsprachige Bücher / Englische Bücher 978-0-521-02997-1, Cambridge University Press

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Soft X-Rays and Extreme Ultraviolet Radiation - neues Buch

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ID: 150793761

This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science. Principles and Applications Buch (fremdspr.) Bücher>Fremdsprachige Bücher>Englische Bücher, Cambridge University Press

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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications
Autor:

Attwood, David

Titel:

Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications

ISBN-Nummer:

052102997X

This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.

Detailangaben zum Buch - Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications


EAN (ISBN-13): 9780521029971
ISBN (ISBN-10): 052102997X
Taschenbuch
Erscheinungsjahr: 2007
Herausgeber: CAMBRIDGE UNIV PR
470 Seiten
Gewicht: 0,866 kg
Sprache: eng/Englisch

Buch in der Datenbank seit 29.05.2007 09:45:08
Buch zuletzt gefunden am 13.10.2016 00:26:07
ISBN/EAN: 052102997X

ISBN - alternative Schreibweisen:
0-521-02997-X, 978-0-521-02997-1

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